An edition of Low Pressure Plasmas and Microstructuring Technology (2009)

Low Pressure Plasmas and Microstructuring Technology

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Cover of: Low Pressure Plasmas and Microstructuring Technology by Gerhard Franz, Gerhard Franz
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Last edited by MARC Bot
November 13, 2020 | History
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An edition of Low Pressure Plasmas and Microstructuring Technology (2009)

Low Pressure Plasmas and Microstructuring Technology

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Publish Date
Publisher
Springer-Verlag Berlin Heidelberg
Language
English

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Previews available in: English

Subjects

Surfaces (Physics), Molecular structure, Materials, Electronics, Optical materials, Plasma (ionized gases), Engineering, Plasma etching, Plasma (Ionized gases), Industrial applications, Plasma engineering, Ionenstrahlbearbeitung, Niederdruckplasma, Hochfrequenzentladung, PECVD-Verfahren, Sputtern, Plasmaätzen, Plasmadiagnostik

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Edition Availability
Cover of: Low Pressure Plasmas and Microstructuring Technology
Low Pressure Plasmas and Microstructuring Technology
Oct 19, 2010, Springer
paperback
Libraries near you: WorldCat
Cover of: Low Pressure Plasmas and Microstructuring Technology
Low Pressure Plasmas and Microstructuring Technology
2009, Springer-Verlag Berlin Heidelberg
electronic resource / in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Published in
Berlin, Heidelberg

Classifications

Library of Congress
TA1750-1750.22TK7800, TA2020 .F73 2009, TA401-492

The Physical Object

Format
[electronic resource] /

ID Numbers

Open Library
OL25554441M
Internet Archive
lowpressureplasm00fran
ISBN 13
9783540858485, 9783540858492
LCCN
2009921817
OCLC/WorldCat
277069476

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Library of Congress MARC record
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marc_columbia MARC record

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November 13, 2020 Edited by MARC Bot import existing book
August 1, 2020 Edited by ImportBot import existing book
July 29, 2014 Created by ImportBot import new book