An edition of Low Pressure Plasmas and Microstructuring Technology
(2009)
Low Pressure Plasmas and Microstructuring Technology
by Gerhard Franz
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Subjects
Surfaces (Physics), Molecular structure, Materials, Electronics, Optical materials, Plasma (ionized gases), Engineering, Plasma etching, Plasma (Ionized gases), Industrial applications, Plasma engineering, Ionenstrahlbearbeitung, Niederdruckplasma, Hochfrequenzentladung, PECVD-Verfahren, Sputtern, Plasmaätzen, Plasmadiagnostik| Edition | Availability |
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1
Low Pressure Plasmas and Microstructuring Technology
Oct 19, 2010, Springer
paperback
3642099394 9783642099397
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2
Low Pressure Plasmas and Microstructuring Technology
2009, Springer-Verlag Berlin Heidelberg
electronic resource /
in English
3540858482 9783540858485
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- Created July 29, 2014
- 8 revisions
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| March 28, 2025 | Edited by ImportBot | Redacting ocaids |
| December 26, 2022 | Edited by MARC Bot | import existing book |
| January 27, 2022 | Edited by ImportBot | import existing book |
| November 13, 2020 | Edited by MARC Bot | import existing book |
| July 29, 2014 | Created by ImportBot | Imported from Internet Archive item record |