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Previews available in: English
Subjects
Microelectromechanical systems, Industrial applications, Microelectronic packaging, Microelectronics, Machining, Lasers, Design and construction, Integrated circuits, Microstructure, Lasers, industrial applications, TECHNOLOGY & ENGINEERING, Mechanical, Microelectronics--design and construction, Lasers--industrial applications, Integrated circuits--design and construction, Microelectromechanical systems--design and construction, Tk7836 .m33 1997, 621.3815/2| Edition | Availability |
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1
Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition
2002, Taylor & Francis Group
in English
1482274000 9781482274004
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2
Fundamentals of microfabrication: the science of miniaturization
2002, CRC Press
in English
- 2nd ed.
0849308267 9780849308260
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Book Details
Edition Notes
Includes bibliographical references (p. 565-569) and index.
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The Physical Object
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History
- Created April 1, 2008
- 13 revisions
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| July 12, 2024 | Edited by MARC Bot | import existing book |
| December 20, 2023 | Edited by ImportBot | import existing book |
| January 14, 2023 | Edited by ImportBot | import existing book |
| December 8, 2022 | Edited by ImportBot | import existing book |
| April 1, 2008 | Created by an anonymous user | Imported from Scriblio MARC record |


