Check nearby libraries
Buy this book
This edition doesn't have a description yet. Can you add one?
Check nearby libraries
Buy this book
Previews available in: English
Subjects
Microelectromechanical systems, Industrial applications, Microelectronic packaging, Microelectronics, Machining, Lasers, Design and construction, Integrated circuits, Microstructure, Lasers, industrial applications, TECHNOLOGY & ENGINEERING, Mechanical, Microelectronics--design and construction, Lasers--industrial applications, Integrated circuits--design and construction, Microelectromechanical systems--design and construction, Tk7836 .m33 1997, 621.3815/2| Edition | Availability |
|---|---|
|
1
Fundamentals of microfabrication: the science of miniaturization
2002, CRC Press
in English
- 2nd ed.
0849308267 9780849308260
|
aaaa
|
|
2
Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition
2002, Taylor & Francis Group
in English
1482274000 9781482274004
|
zzzz
|
| 3 |
eeee
|
Book Details
Edition Notes
Includes bibliographical references and index.
Classifications
The Physical Object
Edition Identifiers
Work Identifiers
Community Reviews (0)
History
- Created October 11, 2008
- 11 revisions
Wikipedia citation
×CloseCopy and paste this code into your Wikipedia page. Need help?
| August 11, 2024 | Edited by MARC Bot | import existing book |
| November 15, 2023 | Edited by MARC Bot | import existing book |
| May 4, 2023 | Edited by ImportBot | import existing book |
| December 16, 2022 | Edited by MARC Bot | import existing book |
| October 11, 2008 | Created by ImportBot | Imported from Oregon Libraries MARC record |


