| Record ID | marc_loc_2016/BooksAll.2016.part25.utf8:107090532:904 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part25.utf8:107090532:904?format=raw |
LEADER: 00904cam a2200265 a 4500
001 96043344
003 DLC
005 20010803144423.0
008 960830s1997 fluaf b 001 0 eng
010 $a 96043344
020 $a0849394511 (acid-free paper)
040 $aDLC$cDLC$dDLC
050 00 $aTK7836$b.M33 1997
082 00 $a621.3815/2$220
100 1 $aMadou, Marc J.
245 10 $aFundamentals of microfabrication /$cMarc Madou.
260 $aBoca Raton, Fla. :$bCRC Press,$cc1997.
300 $a589 p., [22] p. of plates :$bill. (some col.) ;$c29 cm.
504 $aIncludes bibliographical references (p. 565-569) and index.
650 0 $aMicroelectronics.
650 0 $aIntegrated circuits$xDesign and construction.
650 0 $aMicroelectromechanical systems$xDesign and construction.
650 0 $aMachining.
650 0 $aMicroelectronic packaging.
650 0 $aLasers$xIndustrial applications.