An edition of Introduction to microlithography
(1983)
Introduction to microlithography
theory, materials, and processing
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| Edition | Availability |
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Introduction to microlithography: theory, materials, and processing
1983, The Society
in English
0841207755 9780841207752
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Book Details
Table of Contents
An introduction to lithography / L.F. Thompson
The lithographic process
the physics / L.F. Thompson and M.J. Bowden
Organic resist materials
theory and chemistry / C. Grant Willson
Resist processing / L.F. Thompson and M.J. Bowden
Plasma etching / J.A. Mucha and D.W. Hess
Multi-layer resist systems / B.J. Lin.
Edition Notes
Includes bibliographical references and index.
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| December 9, 2022 | Edited by MARC Bot | import existing book |
| March 5, 2018 | Created by ImportBot | import new book |