MARC record from Internet Archive

LEADER: 03582cam 2200745 a 4500
001 ocm09371344
003 OCoLC
005 20180221204832.0
008 830307s1983 dcua b 101 0 eng
010 $a 83005968
040 $aDLC$beng$cDLC$dOCL$dBTCTA$dLVB$dBAKER$dYDXCP$dOCLCG$dOKU$dZWZ$dBDX$dGBVCP$dOCLCO$dOCLCQ$dOCLCF$dOCLCO$dOCL$dOCLCO$dNJR$dOCLCQ
020 $a0841207755
020 $a9780841207752
035 $a(OCoLC)9371344
050 00 $aTR940$b.I57 1983
082 00 $a621.3815/31$220
245 00 $aIntroduction to microlithography :$btheory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983 /$cL.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor.
260 $aWashington, D.C. :$bAmerican Chemical Society,$c1983.
300 $aix, 363 pages :$billustrations ;$c24 cm.
336 $atext$btxt$2rdacontent
337 $aunmediated$bn$2rdamedia
338 $avolume$bnc$2rdacarrier
490 1 $aACS symposium series,$x0097-6156 ;$v219
504 $aIncludes bibliographical references and index.
505 0 $aAn introduction to lithography / L.F. Thompson -- The lithographic process : the physics / L.F. Thompson and M.J. Bowden -- Organic resist materials : theory and chemistry / C. Grant Willson -- Resist processing / L.F. Thompson and M.J. Bowden -- Plasma etching / J.A. Mucha and D.W. Hess -- Multi-layer resist systems / B.J. Lin.
650 0 $aMicrolithography$vCongresses.
650 0 $aPhotoresists$vCongresses.
650 0 $aPlasma etching$vCongresses.
650 0 $aSemiconductors$xEtching$vCongresses.
650 6 $aPhotolithographie$vCongre s.
650 6 $aRe sines photosensibles$vCongre s.
650 6 $aGravure par plasma$vCongre s.
650 6 $aMicrolithographie$vCongre s.
650 7 $aMicrolithographie$xCongre s.$2ram
650 7 $aGravure par plasma$xCongre s.$2ram
650 7 $aMicrolithography.$2fast$0(OCoLC)fst01019883
650 7 $aPhotoresists.$2fast$0(OCoLC)fst01062099
650 7 $aPlasma etching.$2fast$0(OCoLC)fst01066327
650 7 $aSemiconductors$xEtching.$2fast$0(OCoLC)fst01112219
653 0 $aMicrolithography$aCongresses
653 0 $aPhotoresists$aCongresses
653 0 $aPlasma etching$aCongresses
653 0 $aSemiconductors$aEtching$aCongresses
655 7 $aConference papers and proceedings.$2fast$0(OCoLC)fst01423772
700 1 $aThompson, L. F.,$d1944-
700 1 $aWillson, C. G.$q(C. Grant),$d1939-
700 1 $aBowden, M. J.,$d1943-
710 2 $aAmerican Chemical Society.$bDivision of Organic Coatings and Plastics Chemistry.
710 2 $aAmerican Chemical Society.$bMeeting$n(185th :$d1983 :$cSeattle, Wash.)
776 08 $iOnline version:$tIntroduction to microlithography.$dWashington, D.C. : American Chemical Society, 1983$w(OCoLC)629678212
830 0 $aACS symposium series ;$v219.
938 $aBaker and Taylor$bBTCP$n83005968 //r936
938 $aBaker & Taylor$bBKTY$c49.95$d49.95$i0841207755$n0000800531$sactive
938 $aYBP Library Services$bYANK$n829879
938 $aBrodart$bBROD$n35040599$c$42.50
029 1 $aNLGGC$b831001607
029 1 $aNZ1$b2582899
029 1 $aAU@$b000002602381
029 1 $aZWZ$b025099469
029 1 $aAU@$b000048638849
029 1 $aGBVCP$b024285501
029 1 $aNZ1$b148104
029 1 $aNLNZL$b991481043502836
994 $aZ0$bPMR
948 $hNO HOLDINGS IN PMR - 291 OTHER HOLDINGS