An edition of Introduction to microlithography (1983)

Introduction to microlithography

theory, materials, and processing

Cover of: Introduction to microlithography by L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983.
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Last edited by MARC Bot
December 9, 2022 | History
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An edition of Introduction to microlithography (1983)

Introduction to microlithography

theory, materials, and processing

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Publish Date
Publisher
The Society
Language
English
Pages
363

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Previews available in: English

Subjects

Microlithographie, Etching, Plasma etching, Gravure par plasma, Photoresists, Semiconductors, Congrès, Congresses, Résines photosensibles, Photolithographie, Microlithography, Photolithography
Edition Availability
Cover of: Introduction to microlithography
Introduction to microlithography: theory, materials, and processing
1983, The Society
in English

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Book Details

Table of Contents

An introduction to lithography / L.F. Thompson
The lithographic process
the physics / L.F. Thompson and M.J. Bowden
Organic resist materials
theory and chemistry / C. Grant Willson
Resist processing / L.F. Thompson and M.J. Bowden
Plasma etching / J.A. Mucha and D.W. Hess
Multi-layer resist systems / B.J. Lin.

Edition Notes

Includes bibliographical references and index.

Published in
Washington, D.C
Series
ACS symposium series,, 219

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TR940 .I57 1983

The Physical Object

Pagination
ix, 363 p. :
Number of pages
363

Edition Identifiers

Open Library
OL3164086M
ISBN 10
0841207755
LCCN
83005968
OCLC/WorldCat
9371344
Goodreads
5736173

Work Identifiers

Work ID
OL17846391W

Source records

Internet Archive item record
Internet Archive item record
Internet Archive item record
Library of Congress MARC record
marc_columbia MARC record

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December 9, 2022 Edited by MARC Bot import existing book
October 28, 2020 Edited by MARC Bot import existing book
July 1, 2019 Edited by MARC Bot import existing book
July 1, 2019 Edited by MARC Bot import existing book
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record