An edition of Emerging lithographic technologies V (2001)

Emerging lithographic technologies V

27 February-1 March, 2001, Santa Clara, [California], USA

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Cover of: Emerging lithographic technologies V by Elizabeth A. Dobisz, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH.
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Last edited by ImportBot
July 31, 2023 | History
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An edition of Emerging lithographic technologies V (2001)

Emerging lithographic technologies V

27 February-1 March, 2001, Santa Clara, [California], USA

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
818

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Previews available in: English

Subjects
Electron beam Lithography, Congresses, Microlithography, Industrial applications, X-ray lithography, X-rays, Masks (Electronics), X-rays, industrial applications, Masks (electronics), Lithography, electron beam

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Edition Availability
Cover of: Emerging lithographic technologies V
Emerging lithographic technologies V: 27 February-1 March, 2001, Santa Clara, [California], USA
2001, SPIE
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
Proceedings of SPIE ;, v. 4343, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4343.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7874 .E525 2001, TK7874.E525 2001

The Physical Object

Pagination
xv, 818 p. :
Number of pages
818

ID Numbers

Open Library
OL3971422M
Internet Archive
emerginglithogra4343unse
ISBN 10
0819440299
LCCN
2001279005
OCLC/WorldCat
48153041
Goodreads
1965347

Source records

Library of Congress MARC record
Better World Books record
Internet Archive item record
marc_columbia MARC record

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History

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July 31, 2023 Edited by ImportBot import existing book
January 17, 2023 Edited by ImportBot import existing book
December 4, 2020 Created by MARC Bot import existing book