An edition of Emerging lithographic technologies V (2001)

Emerging lithographic technologies V

27 February-1 March, 2001, Santa Clara, [California], USA

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Cover of: Emerging lithographic technologies V by Elizabeth A. Dobisz, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH.
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Last edited by MARC Bot
November 14, 2023 | History
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An edition of Emerging lithographic technologies V (2001)

Emerging lithographic technologies V

27 February-1 March, 2001, Santa Clara, [California], USA

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
818

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Previews available in: English

Subjects
Electron beam Lithography, Congresses, Microlithography, Industrial applications, X-ray lithography, X-rays, Masks (Electronics), X-rays, industrial applications, Masks (electronics), Lithography, electron beam

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Edition Availability
Cover of: Emerging lithographic technologies V
Emerging lithographic technologies V: 27 February-1 March, 2001, Santa Clara, [California], USA
2001, SPIE
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
Proceedings of SPIE ;, v. 4343, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4343.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7874 .E525 2001, TK7874.E525 2001

The Physical Object

Pagination
xv, 818 p. :
Number of pages
818

ID Numbers

Open Library
OL3971422M
Internet Archive
emerginglithogra4343unse
ISBN 10
0819440299
LCCN
2001279005
OCLC/WorldCat
48153041
Goodreads
1965347

Source records

Library of Congress MARC record
Better World Books record
Internet Archive item record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
November 14, 2023 Edited by MARC Bot import existing book
July 31, 2023 Edited by ImportBot import existing book
January 17, 2023 Edited by ImportBot import existing book
December 4, 2020 Edited by MARC Bot import existing book
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record