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Publish Date
1979
Language
English
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Subjects
Silane, Silicon, SemiconductorsShowing 2 featured editions. View all 2 editions?
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1
Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor grade for silicon: low cost silicon array project.
1979, Dept. of Energy, for sale by the National Technical Information Service
in English
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2
Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor grade for silicon: low cost silicon array project.
1979, Dept. of Energy, for sale by the National Technical Information Service
in English
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Book Details
Published in
[Washington], Springfield, Va
Edition Notes
Authors: W. C. Breneman, E. G. Farrier, H. Morihara.
Contract no. NAS-7-100-954334.
Includes bibliographical references.
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Feedback?January 18, 2010 | Edited by WorkBot | add subjects and covers |
December 11, 2009 | Created by WorkBot | add works page |