Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor grade for silicon

low cost silicon array project.

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Feasibility of low-cost, high-volume producti ...
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December 15, 2009 | History

Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor grade for silicon

low cost silicon array project.

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Book Details


Published in

[Washington], Springfield, Va

Table of Contents

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Edition Notes

Authors: W. C. Breneman, E. G. Farrier, H. Morihara.

Contract no. NAS-7-100-954334.

Includes bibliographical references.

Series
DOE/JPL ; 954334-8

The Physical Object

Pagination
v. :

ID Numbers

Open Library
OL15230206M

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History

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December 15, 2009 Edited by WorkBot link works
September 18, 2008 Created by ImportBot Imported from Oregon Libraries MARC record.