Cover of: The science and engineering of microelectronic fabrication | Stephen A. Campbell

The science and engineering of microelectronic fabrication

Published by Oxford University Press in New York .
Written in English.

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Edition Notes

Includes bibliographical references and index.

Series
Oxford series in electrical engineering

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7871.85 .C25 1996

The Physical Object

Pagination
xv, 536 p. :
Number of pages
536

ID Numbers

Open Library
OL799328M
Internet Archive
scienceengineeri00camp
ISBN 10
0195105087
LC Control Number
95035577
Library Thing
2034630
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History

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May 6, 2017 Edited by ImportBot import new book
July 30, 2010 Edited by IdentifierBot added LibraryThing ID
April 14, 2010 Edited by Open Library Bot Linked existing covers to the edition.
December 11, 2009 Edited by WorkBot link works
April 1, 2008 Created by an anonymous user Initial record created, from Scriblio MARC record.