| Record ID | marc_records_scriblio_net/part25.dat:16964301:751 |
| Source | Scriblio |
| Download Link | /show-records/marc_records_scriblio_net/part25.dat:16964301:751?format=raw |
LEADER: 00751cam 2200217 a 4500
001 95035577
003 DLC
005 20040913141932.0
008 950719s1996 nyua b 001 0 eng
010 $a 95035577
020 $a0195105087 (cl : acid-free paper)
040 $aDLC$cDLC$dDLC
050 00 $aTK7871.85$b.C25 1996
082 00 $a621.3815/2$220
100 1 $aCampbell, Stephen A.,$d1954-
245 14 $aThe science and engineering of microelectronic fabrication /$cStephen A. Campbell.
260 $aNew York :$bOxford University Press,$c1996.
300 $axv, 536 p. :$bill. ;$c25 cm.
440 0 $aOxford series in electrical engineering
504 $aIncludes bibliographical references and index.
650 0 $aSemiconductors$xDesign and construction.