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Edition | Availability |
---|---|
1
Silicon processing for the VLSI era
2002, Lattice Press
in English
- 2nd ed.
0961672161 9780961672164
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2
Silicon processing for the VLSI era
1986, Lattice Press, Brand: Lattice Press
in English
0961672137 9780961672133
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Book Details
Table of Contents
v. 1. Process technology
v. 2. Process integration
v. 3. The submicron MOSFET.
Edition Notes
Includes bibliographies and indexes.
Classifications
The Physical Object
Edition Identifiers
Work Identifiers
Community Reviews (0)
History
- Created April 1, 2008
- 22 revisions
Wikipedia citation
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July 5, 2025 | Edited by MARC Bot | import existing book |
March 28, 2025 | Edited by ImportBot | Redacting ocaids |
July 21, 2024 | Edited by MARC Bot | import existing book |
April 4, 2023 | Edited by ImportBot | import existing book |
April 1, 2008 | Created by an anonymous user | Imported from Scriblio MARC record |