| Record ID | ia:siliconprocessin0000wolf |
| Source | Internet Archive |
| Download MARC XML | https://archive.org/download/siliconprocessin0000wolf/siliconprocessin0000wolf_marc.xml |
| Download MARC binary | https://www.archive.org/download/siliconprocessin0000wolf/siliconprocessin0000wolf_meta.mrc |
LEADER: 01007cam a2200301 a 4500
001 86081923
003 DLC
005 20031125143323.0
008 860702m19861995caua b 001 0 eng
010 $a 86081923
020 $a0961672137 (cover : v. 1)
020 $z0096167237 (v. 1)
020 $z096167245 (v. 2)
020 $a0961672145 (v. 2)
020 $z0906167253 (v. 3)
040 $aDLC$cDLC$dDLC
050 00 $aTK7874$b.W635 1986
082 00 $a621.381/73$219
100 1 $aWolf, Stanley,$d1943-
245 10 $aSilicon processing for the VLSI era /$cStanley Wolf, Richard N. Tauber.
260 $aSunset Beach, Calif. :$bLattice Press,$cc1986-c1995.
300 $a3 v. :$bill. ;$c25 cm.
504 $aIncludes bibliographies and indexes.
505 1 $av. 1. Process technology -- v. 2. Process integration -- v. 3. The submicron MOSFET.
650 0 $aSemiconductors$xEtching.
650 0 $aIntegrated circuits$xVery large scale integration.
650 0 $aSilicon.
700 1 $aTauber, Richard N.