An edition of Advances in Rapid Thermal and Integrated Processing (1996)

Advances in Rapid Thermal and Integrated Processing

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Cover of: Advances in Rapid Thermal and Integrated Processing by Fred Roozeboom, Fred Roozeboom
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An edition of Advances in Rapid Thermal and Integrated Processing (1996)

Advances in Rapid Thermal and Integrated Processing

by

Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.

Publish Date
Publisher
Springer Netherlands
Language
English
Pages
566

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Subjects

Surfaces (Physics), Physics, Optical materials, Semiconductors
Edition Availability
Cover of: Advances in Rapid Thermal and Integrated Processing
Advances in Rapid Thermal and Integrated Processing
1996, Springer Netherlands
electronic resource / in English

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Book Details

Edition Notes

Online full text is restricted to subscribers.

Also available in print.

Mode of access: World Wide Web.

Published in
Dordrecht
Series
NATO ASI Series, Series E: Applied Sciences -- 318, NATO ASI Series, Series E: Applied Sciences -- 318
Other Titles
Proceedings of the NATO Advanced Study Institute, Acquafredda di Maratea, Italy, July 3-14, 1995

Classifications

Dewey Decimal Class
530.41
Library of Congress
QC176-176.9, QC1-75, QC173.45-173.458

The Physical Object

Format
[electronic resource] /
Pagination
1 online resource (xii, 566 p.)
Number of pages
566

Edition Identifiers

Open Library
OL27015249M
ISBN 10
9048146968, 9401587116
ISBN 13
9789048146963, 9789401587112
OCLC/WorldCat
851378007

Work Identifiers

Work ID
OL19824746W

Source records

Internet Archive item record
Better World Books record
Better World Books record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
March 28, 2025 Edited by ImportBot Redacting ocaids
March 1, 2022 Edited by ImportBot import existing book
October 4, 2021 Edited by ImportBot import existing book
June 28, 2019 Created by MARC Bot Imported from Internet Archive item record