An edition of Semiconductor Lithography
(1987)
Semiconductor lithography
principles, practices, and materials
by Wayne M. Moreau
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Last edited by bgimpertBot
April 16, 2010 | History
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Microlithography, Photoresists, Semiconductors| Edition | Availability |
|---|---|
1
Semiconductor lithography: principles, practices, and materials
1988, Plenum Press
in English
0306421852 9780306421853
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2
Semiconductor Lithography: Principles, Practices, and Materials (Microdevices)
December 31, 1987, Springer
Paperback
in English
- 1 edition
0306421852 9780306421853
|
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|
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Includes bibliographies and index.
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- Created April 1, 2008
- 3 revisions
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| April 16, 2010 | Edited by bgimpertBot | Added goodreads ID. |
| December 12, 2009 | Edited by WorkBot | link works |
| April 1, 2008 | Created by an anonymous user | Imported from Scriblio MARC record |