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Subjects
Microlithography, Photoresists, SemiconductorsEdition | Availability |
---|---|
1
Semiconductor lithography: principles, practices, and materials
1988, Plenum Press
in English
0306421852 9780306421853
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2
Semiconductor Lithography: Principles, Practices, and Materials (Microdevices)
December 31, 1987, Springer
Paperback
in English
- 1 edition
0306421852 9780306421853
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- Created April 30, 2008
- 8 revisions
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October 4, 2025 | Edited by ImportBot | import existing book |
July 22, 2024 | Edited by MARC Bot | import existing book |
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April 30, 2008 | Created by an anonymous user | Imported from amazon.com record |