An edition of Semiconductor Lithography (1987)

Semiconductor Lithography

Principles, Practices, and Materials (Microdevices)

1 edition
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Last edited by ImportBot
October 4, 2025 | History
An edition of Semiconductor Lithography (1987)

Semiconductor Lithography

Principles, Practices, and Materials (Microdevices)

1 edition

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
Springer
Language
English
Pages
952

Buy this book

Edition Availability
Cover of: Semiconductor lithography
Semiconductor lithography: principles, practices, and materials
1988, Plenum Press
in English
Cover of: Semiconductor Lithography
Semiconductor Lithography: Principles, Practices, and Materials (Microdevices)
December 31, 1987, Springer
Paperback in English - 1 edition

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Book Details


Classifications

Library of Congress
TK7871.85 .M583 1988

The Physical Object

Format
Paperback
Number of pages
952
Dimensions
10.5 x 7 x 2 inches
Weight
4 pounds

Edition Identifiers

Open Library
OL10323677M
ISBN 10
0306421852
ISBN 13
9780306421853
LCCN
87029077
OCLC/WorldCat
16871199
Goodreads
1972715

Work Identifiers

Work ID
OL4980162W

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History

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October 4, 2025 Edited by ImportBot import existing book
July 22, 2024 Edited by MARC Bot import existing book
April 15, 2023 Edited by ImportBot import existing book
November 6, 2020 Edited by MARC Bot import existing book
April 30, 2008 Created by an anonymous user Imported from amazon.com record