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Publish Date
1991
Publisher
Institute of Electrical and Electronics Engineers,
May be purchased from IEEE Service Center
Language
English
Pages
212
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Edition | Availability |
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1
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop: ASMC '91 proceedings : October 21-23, 1991, Boston, Massachusetts.
1991, Institute of Electrical and Electronics Engineers, May be purchased from IEEE Service Center
in English
0780301528 9780780301528
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Book Details
Edition Notes
"Sponsored by Semiconductor Equipment and Materials International ... [et al.]. Held in conjunction with SEMICON/East 91"--Cover.
IEEE catalog number 91-CH3042-9"--T.p. verso.
Includes bibliographical references.
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History
- Created October 31, 2008
- 3 revisions
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January 15, 2023 | Edited by ImportBot | import existing book |
December 15, 2009 | Edited by WorkBot | link works |
October 31, 2008 | Created by ImportBot | Imported from Oregon Libraries MARC record |