| Record ID | marc_oregon_summit_records/catalog_files/washs02192008.mrc_revrev.mrc:883027314:1556 |
| Source | Oregon Libraries |
| Download Link | /show-records/marc_oregon_summit_records/catalog_files/washs02192008.mrc_revrev.mrc:883027314:1556?format=raw |
LEADER: 01556nam a2200361 a 4500
001 26801077
005 19950727075332.7
008 920123s1991 nyua b 100 0 eng
010 $a 91072812
020 $a0780301528 (softbound)
020 $a0780301536 (casebound)
020 $a0780301544 (microfiche)
035 $aWSU000750230
040 $aDLC$cDLC$dWaOLN
050 00 $aTK7836$b.I42 1991
082 00 $a621.3815/2$220
111 2 $aIEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop$n(2nd :$d1991 :$cBoston, Mass.)
245 10 $aIEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop :$bASMC '91 proceedings : October 21-23, 1991, Boston, Massachusetts.
260 $aNew York :$bInstitute of Electrical and Electronics Engineers ;$aPiscataway, NJ :$bMay be purchased from IEEE Service Center,$cc1991.
300 $aix, 212 p. :$bill. ;$c28 cm.
500 $a"Sponsored by Semiconductor Equipment and Materials International ... [et al.]. Held in conjunction with SEMICON/East 91"--Cover.
500 $aIEEE catalog number 91-CH3042-9"--T.p. verso.
504 $aIncludes bibliographical references.
650 0 $aSemiconductor industry$vCongresses.
650 0 $aSemiconductors$xDesign and construction$vCongresses.
650 0 $aProcess control$vCongresses.
710 2 $aSemiconductor Equipment and Masterials International.
907 $a.b19987596$bwo $c-
902 $a050810
998 $b1$c950717$dm$ea$f-$g0
907 $a.b19987596
940 $lWO
945 $lwos $aTK7836$b.I42 1991