An edition of Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems (1997)

Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems

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Antireflecting-chromium linewidth standard, S ...
James E. Potzick.
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Last edited by VacuumBot
August 13, 2012 | History
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An edition of Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems (1997)

Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O.
Language
English
Pages
23

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Subjects
Standards, Calibration, Spectra, Masks, Microscopes, Measurement, Chromium, Integrated circuits

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Edition Availability
Cover of: Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
1997, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O.
Microform in English
Cover of: Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
1997, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O.
Microform in English
Cover of: Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
1997, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O.
Microform in English
Cover of: Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
1997, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O.
Microform in English
  • Not in Library
Libraries near you: WorldCat
Cover of: Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
1997, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O
in English
Cover of: Antireflecting-Chromium Linewidth Standard, SRM 473, for Calibration of Optical Microscope Linewidth Measuring Systems
Antireflecting-Chromium Linewidth Standard, SRM 473, for Calibration of Optical Microscope Linewidth Measuring Systems
1997, United States Government Printing Office
in English
Libraries near you: WorldCat
Cover of: Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
1997, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O.
Microform in English
Libraries near you: WorldCat
Cover of: Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
1997, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O.
Microform in English

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Book Details

Edition Notes

Distributed to depository libraries in microfiche.

Shipping list no.: 98-0086-M.

Includes bibliographical references (p. 17-18)

Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., [1997] 1 microfiche : negative.

Published in
Gaithersburg, MD, Washington
Series
NIST special publication -- 260-129., Standard reference materials
Other Titles
Antireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems.

The Physical Object

Format
Microform
Pagination
xiii, 23 p.
Number of pages
23

ID Numbers

Open Library
OL16309617M
OCLC/WorldCat
38470852

Source records

Oregon Libraries MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
August 13, 2012 Edited by VacuumBot Updated format '[microform] /' to 'Microform'; cleaned up pagination; Removed author from Edition (author found in Work)
December 15, 2009 Edited by WorkBot link works
April 21, 2009 Edited by ImportBot add OCLC number
September 23, 2008 Created by ImportBot Imported from Oregon Libraries MARC record