An edition of Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
(1997)
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
by James E. Potzick
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Publish Date
1997
Publisher
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
For sale by the Supt. of Docs., U.S. G.P.O.
Language
English
Pages
23
Buy this book
Subjects
Standards, Calibration, Spectra, Masks, Microscopes, Measurement, Chromium, Integrated circuitsShowing 8 featured editions. View all 8 editions?
| Edition | Availability |
|---|---|
1
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
1997, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O.
Microform
in English
|
zzzz
Libraries near you:
WorldCat
|
|
2
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
1997, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O.
Microform
in English
|
zzzz
|
|
3
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
1997, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O.
Microform
in English
|
aaaa
|
|
4
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
1997, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O.
Microform
in English
|
zzzz
Libraries near you:
WorldCat
|
|
5
Antireflecting-Chromium Linewidth Standard, SRM 473, for Calibration of Optical Microscope Linewidth Measuring Systems
1997, United States Government Printing Office
in English
0160545242 9780160545245
|
zzzz
Libraries near you:
WorldCat
|
|
6
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
1997, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O.
Microform
in English
|
zzzz
|
|
7
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
1997, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O.
Microform
in English
|
zzzz
|
|
8
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
1997, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O
in English
|
zzzz
|
Book Details
Edition Notes
Distributed to depository libraries in microfiche.
Shipping list no.: 98-0086-M.
Includes bibliographical references (p. 17-18).
Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., [1997] 1 microfiche : negative.
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History
- Created October 10, 2008
- 3 revisions
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| August 8, 2012 | Edited by VacuumBot | Updated format '[microform] /' to 'Microform'; cleaned up pagination |
| December 15, 2009 | Edited by WorkBot | link works |
| October 10, 2008 | Created by ImportBot | Imported from Oregon Libraries MARC record |