Gas-phase and surface chemistry in electronic materials processing

symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

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Last edited by MARC Bot
July 25, 2024 | History

Gas-phase and surface chemistry in electronic materials processing

symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

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Publish Date
Language
English
Pages
556

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Book Details


Edition Notes

Includes bibliographical references and indexes.

Published in
Pittsburgh, Pa
Series
Materials Research Society symposium proceedings ;, v. 334, Materials Research Society symposia proceedings ;, v. 334.

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7871 .G37 1994

The Physical Object

Pagination
xv, 556 p. :
Number of pages
556

Edition Identifiers

Open Library
OL1085739M
ISBN 10
1558992332
LCCN
94009632
OCLC/WorldCat
502451323
Goodreads
4930058

Work Identifiers

Work ID
OL19483121W

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July 25, 2024 Edited by MARC Bot import existing book
November 18, 2020 Edited by MARC Bot import existing book
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April 3, 2019 Edited by MARC Bot import existing book
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record