Analytical and diagnostic techniques for semiconductor materials, devices, and processes

joint proceedings of symposia on: ALTEC 2003 : Analytical techniques for semiconductor materials and process characterization IV : Paris, France ; and the 202nd Meeting of the Electrochemical Society : Diagnostic techniques for semiconductor materials and devices VI : Salt Lake City, Utah

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Last edited by Open Library Bot
December 5, 2010 | History

Analytical and diagnostic techniques for semiconductor materials, devices, and processes

joint proceedings of symposia on: ALTEC 2003 : Analytical techniques for semiconductor materials and process characterization IV : Paris, France ; and the 202nd Meeting of the Electrochemical Society : Diagnostic techniques for semiconductor materials and devices VI : Salt Lake City, Utah

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  • 0 Want to read
  • 0 Currently reading
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Publish Date
Language
English
Pages
556

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Book Details


Edition Notes

Includes bibliographic references and indexes.
"... ALTECH 2003 was Symposium J1 held at the 203rd Meeting of the Electrochemical Society in Paris, France from April 27 to May 2, 2003 ... Symposium M1, Diagnostic Techniques for Semiconductor Materials and Devices, was part of the 202nd Meeting of the Electrochemical Society held in Salt Lake City, Utah, from October 21 to 25, 2002 ..."--p. iii.

Published in
Pennington, N.J, Bellingham, Wash
Series
ECS Proceedings ;, v. 2003-03, SPIE ;, v. 5133, Proceedings (Electrochemical Society), v. 2003-03., Proceedings of SPIE--the International Society for Optical Engineering ;, v. 5133.
Genre
Congresses.
Other Titles
Analytical techniques for semiconductor materials and process characterization IV, Diagnostic techniques for semiconductor materials and devices VI

Classifications

Library of Congress
QD139.S44 A47 2003

The Physical Object

Pagination
xii, 556 p. :
Number of pages
556

ID Numbers

Open Library
OL3695533M
ISBN 10
1566773482
LCCN
2003100709

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History

Download catalog record: RDF / JSON
December 5, 2010 Edited by Open Library Bot Added subjects from MARC records.
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 10, 2009 Created by WorkBot add works page