MARC Record from Library of Congress

LEADER: 02534cam a22003737a 4500
001 2003100709
003 DLC
005 20130828074527.0
008 030115s2003 njua b 101 0 eng d
010 $a 2003100709
020 $a1566773482 (Electrochemical Society)
020 $z0889449997 (SPIE)
040 $aMoKL$cMoKL$dDLC
042 $alccopycat
050 00 $aQD139.S44$bA47 2003
111 2 $aALTECH 2003$d(2003 :$cParis, France)
245 10 $aAnalytical and diagnostic techniques for semiconductor materials, devices, and processes :$bjoint proceedings of the symposia on: ALTECH 2003 : Analytical techniques for semiconductor materials and process characterization IV : Paris, France ; and the 202nd Meeting of the Electrochemical Society : Diagnostic techniques for semiconductor materials and devices VI : Salt Lake City, Utah /$ceditors, Bernd O. Kolbesen ... [et al.] ; sponsored by the Electrochemical Society Electronics Division ; published in cooperation with: SPIE--the International Society for Optical Engineering.
246 30 $aAnalytical techniques for semiconductor materials and process characterization IV
246 30 $aDiagnostic techniques for semiconductor materials and devices VI
260 $aPennington, N.J. :$bElectrochemical Society ;$aBellingham, Wash. :$bSPIE,$cc2003.
300 $axii, 556 p. :$bill. ;$c23 cm.
490 1 $aECS Proceedings ;$vv. 2003-03
490 1 $aSPIE ;$vv. 5133
500 $a"... ALTECH 2003 was Symposium J1 held at the 203rd Meeting of the Electrochemical Society in Paris, France from April 27 to May 2, 2003 ... Symposium M1, Diagnostic Techniques for Semiconductor Materials and Devices, was part of the 202nd Meeting of the Electrochemical Society held in Salt Lake City, Utah, from October 21 to 25, 2002 ..."--p. iii.
504 $aIncludes bibliographic references and indexes.
650 0 $aSemiconductors$xAnalysis$vCongresses.
700 1 $aKolbesen, Bernd O.
710 2 $aElectrochemical Society.$bElectronics Division.
710 2 $aElectrochemical Society.$bMeeting$n(202nd :$d2002 :$cSalt Lake City, Utah)
710 2 $aElectrochemical Society.$bMeeting$n(203rd :$d2003 :$cParis, France)
710 2 $aSociety of Photo-optical Instrumentation Engineers
711 2 $aSymposium on Diagnostic Techniques for Semiconductor Materials and Devices$n(6th :$d2002 :$cSalt Lake City, Utah)
830 0 $aProceedings (Electrochemical Society)$vv. 2003-03.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 5133.