An edition of The physics of submicron lithography (1992)

The physics of submicron lithography

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Cover of: The physics of submicron lithography by Kamilʹ Akhmetovich Valiev
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Last edited by ImportBot
February 25, 2022 | History
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An edition of The physics of submicron lithography (1992)

The physics of submicron lithography

by

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  • 0 Have read

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Publish Date
Publisher
Plenum Press
Language
English
Pages
493

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Previews available in: English

Subjects
Electron beam Lithography, Ion beam lithography, Physics, X-ray lithography, Lithography, electron beam

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Edition Availability
Cover of: The physics of submicron lithography
The physics of submicron lithography
1992, Plenum Press
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
New York
Series
Microdevices

Classifications

Dewey Decimal Class
621.381/531
Library of Congress
TK7874 .V336 1992, QC173.45-173.458

The Physical Object

Pagination
xi, 493 p. :
Number of pages
493

ID Numbers

Open Library
OL1560032M
Internet Archive
physicsofsubmicr0000vali
ISBN 10
0306435780
LCCN
91041122
Goodreads
4457924

Source records

Scriblio MARC record
Library of Congress MARC record
Library of Congress MARC record
Better World Books record
Internet Archive item record
Promise Item

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History

Download catalog record: RDF / JSON
February 25, 2022 Edited by ImportBot import existing book
December 4, 2010 Edited by Open Library Bot Added subjects from MARC records.
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 10, 2009 Created by WorkBot add works page