| Record ID | marc_records_scriblio_net/part22.dat:26611904:748 |
| Source | Scriblio |
| Download Link | /show-records/marc_records_scriblio_net/part22.dat:26611904:748?format=raw |
LEADER: 00748pam 2200253 a 4500
001 91041122
003 DLC
005 19920420143919.7
008 911023s1992 nyua b 00110 eng
010 $a 91041122
020 $a0306435780
040 $aDLC$cDLC$dDLC
050 00 $aTK7874$b.V336 1992
082 00 $a621.381/531$220
100 10 $aValiev, Kamilʹ Akhmetovich.
245 14 $aThe physics of submicron lithography /$cKamil A. Valiev.
260 0 $aNew York :$bPlenum Press,$cc1992.
300 $axi, 493 p. :$bill. ;$c26 cm.
440 0 $aMicrodevices
504 $aIncludes bibliographical references and index.
650 0 $aLithography, Electron beam.
650 0 $aX-ray lithography.
650 0 $aIon beam lithography.
650 0 $aPhysics.