Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry

Survey of optical characterization methods fo ...
W. Murray Bullis, W. Murray Bu ...
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February 17, 2010 | History

Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry

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Edition Availability
Cover of: Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry
Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry
1995, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
Microform in English
Cover of: Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry
Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry
1995, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
Microform in English
Cover of: Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry
Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry
1995, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
Microform in English
Cover of: Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry
Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry
1995, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
Microform in English

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Book Details


Edition Notes

Distributed to depository libraries in microfiche.

Shipping list no.: 97-0518-M.

Paper version no longer available for sale by the Supt. of Docs.

"December 1995."

Includes bibliographical references.

Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1997] 1 microfiche : negative.

Published in
Gaithersburg, MD
Series
NIST special publication -- 400-98., Semiconductor measurement technology

The Physical Object

Format
Microform
Pagination
iv, 51 p.
Number of pages
51

Edition Identifiers

Open Library
OL17806078M
OCLC/WorldCat
37207896

Work Identifiers

Work ID
OL3655402W

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