Proceedings of the Fourth International Symposium of Process Physics and Modeling in Semiconductor Technology

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Last edited by MARC Bot
August 4, 2024 | History

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Publish Date
Language
English
Pages
528

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Book Details


Edition Notes

Includes bibliographical references and indexes.

Published in
Pennington, NJ
Series
Proceedings / Electrochemical Society ;, v. 96-4, Proceedings (Electrochemical Society) ;, v. 96-4.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7871.85 .I5835 1996

The Physical Object

Pagination
x, 528 p. :
Number of pages
528

Edition Identifiers

Open Library
OL825846M
ISBN 10
1566771544
LCCN
95083752
OCLC/WorldCat
35791959
Goodreads
1155550

Work Identifiers

Work ID
OL3010423W

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History

Download catalog record: RDF / JSON
August 4, 2024 Edited by MARC Bot import existing book
July 31, 2019 Edited by MARC Bot associate edition with work OL3010423W
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
February 12, 2010 Edited by WorkBot add more information to works
December 10, 2009 Created by WorkBot add works page