Proceedings of the Fourth International Symposium of Process Physics and Modeling in Semiconductor Technology

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Last edited by MARC Bot
July 31, 2019 | History

Proceedings of the Fourth International Symposium of Process Physics and Modeling in Semiconductor Technology

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Publish Date
Language
English
Pages
528

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Edition Availability
Cover of: Proceedings of the 4th International Symposium on Process Physics and Modeling (Proceedings (Electrochemical Society), V. 96-4.)
Cover of: Proceedings of the Fourth International Symposium of Process Physics and Modeling in Semiconductor Technology

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Book Details


Published in

Pennington, NJ

Edition Notes

Includes bibliographical references and indexes.

Series
Proceedings / Electrochemical Society ;, v. 96-4, Proceedings (Electrochemical Society) ;, v. 96-4.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7871.85 .I5835 1996

The Physical Object

Pagination
x, 528 p. :
Number of pages
528

ID Numbers

Open Library
OL825846M
ISBN 10
1566771544
LCCN
95083752
Goodreads
1155550

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History

Download catalog record: RDF / JSON
July 31, 2019 Edited by MARC Bot associate edition with work OL3010423W
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
February 12, 2010 Edited by WorkBot add more information to works
December 10, 2009 Created by WorkBot add works page