An edition of Characterization of plasma-enhanced CVD processes (1990)

Characterization of plasma-enhanced CVD processes

symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.

by , , and

Cover of: Characterization of plasma-enhanced CVD processes by Dale E. Ibbotson, Dennis W. Hess, Gerald Lucovsky
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October 5, 2021 | History
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An edition of Characterization of plasma-enhanced CVD processes (1990)

Characterization of plasma-enhanced CVD processes

symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.

by , , and

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Publish Date
Publisher
Materials Research Society
Language
English
Pages
250

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Subjects

Congresses, Plasma-enhanced chemical vapor deposition, Integrated circuits, Design and construction, Metal Manufacturing, Science/Mathematics, Vapor-plating, Electronic circuit design
Edition Availability
Cover of: Characterization of Plasma-Enhanced CVD Processes
Characterization of Plasma-Enhanced CVD Processes: Volume 165
2014, University of Cambridge ESOL Examinations
in English
Cover of: Characterization of Plasma-Enhanced Cvd Processes
Characterization of Plasma-Enhanced Cvd Processes: Symposium Held November 27-28, 1989, Boston, Massachusetts, U.S.A. (Materials Research Society Symposium Proceedings)
June 1990, Materials Research Society
Hardcover in English
Cover of: Characterization of plasma-enhanced CVD processes
Characterization of plasma-enhanced CVD processes: symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.
1990, Materials Research Society
in English

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Book Details

Edition Notes

Includes bibliographical references and indexes.

Published in
Pittsburgh, Pa
Series
Materials Research Society symposium proceedings ;, v. 165, Materials Research Society symposia proceedings ;, v. 165.

Classifications

Dewey Decimal Class
621.381/52
Library of Congress
TS695.15 .C47 1990

The Physical Object

Pagination
ix, 250 p. :
Number of pages
250

Edition Identifiers

Open Library
OL1854752M
ISBN 10
1558990534
LCCN
90006543
OCLC/WorldCat
21974391
Goodreads
2421493

Work Identifiers

Work ID
OL19206511W

Source records

Scriblio MARC record
Better World Books record
Library of Congress MARC record
marc_columbia MARC record
Harvard University record

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October 5, 2021 Edited by ImportBot import existing book
July 31, 2020 Edited by ImportBot import existing book
July 31, 2019 Edited by MARC Bot associate edition with work OL19206511W
March 11, 2019 Created by MARC Bot import existing book