Characterization of plasma-enhanced CVD processes

symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.

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Last edited by MARC Bot
February 28, 2025 | History

Characterization of plasma-enhanced CVD processes

symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.

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Publish Date
Language
English
Pages
250

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Book Details


Edition Notes

Includes bibliographical references and indexes.

Published in
Pittsburgh, Pa
Series
Materials Research Society symposium proceedings ;, v. 165, Materials Research Society symposia proceedings ;, v. 165.

Classifications

Dewey Decimal Class
621.381/52
Library of Congress
TS695.15 .C47 1990

The Physical Object

Pagination
ix, 250 p. :
Number of pages
250

Edition Identifiers

Open Library
OL1854752M
ISBN 10
1558990534
LCCN
90006543
OCLC/WorldCat
21974391
Goodreads
2421493

Work Identifiers

Work ID
OL19206511W

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February 28, 2025 Edited by MARC Bot import existing book
July 27, 2024 Edited by MARC Bot import existing book
November 11, 2020 Edited by MARC Bot import existing book
July 31, 2020 Edited by ImportBot import existing book
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record