An edition of Chemical mechanical polishing in silicon processing (1999)

Chemical mechanical polishing in silicon processing

by and

Cover of: Chemical mechanical polishing in silicon processing by Miller, Robert M., Robert K. Willardson
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Last edited by ImportBot
April 9, 2023 | History
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An edition of Chemical mechanical polishing in silicon processing (1999)

Chemical mechanical polishing in silicon processing

by and

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Publish Date
Publisher
Academic Press
Language
English
Pages
307

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Subjects

Silicon, Grinding and polishing
Edition Availability
Cover of: Chemical mechanical polishing in silicon processing
Chemical mechanical polishing in silicon processing
2000, Academic Press
in English
  • Not in Library
Libraries near you: WorldCat
Cover of: Chemical Mechanical Polishing in Silicon Processing
Chemical Mechanical Polishing in Silicon Processing
1999, Elsevier Science & Technology Books
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
San Diego, CA
Series
Semiconductors and semimetals -- v. 63

Classifications

Library of Congress

The Physical Object

Pagination
xv, 307 p. :
Number of pages
307

ID Numbers

Open Library
OL15468487M
ISBN 10
0127521720
OCLC/WorldCat
42707637
Library Thing
4669750
Goodreads
3372115

Source records

Western Washington University MARC record
Better World Books record
amazon.com record

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History

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April 9, 2023 Edited by ImportBot import existing book
July 31, 2020 Edited by ImportBot import existing book
February 7, 2019 Created by MARC Bot import existing book