Chemical Mechanical Polishing in Silicon Processing

Chemical Mechanical Polishing in Silicon Proc ...
Miller, Robert M., Robert K. W ...
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Last edited by ImportBot
October 6, 2021 | History

Chemical Mechanical Polishing in Silicon Processing

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Publish Date
Language
English

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Edition Availability
Cover of: Chemical mechanical polishing in silicon processing
Chemical mechanical polishing in silicon processing
2000, Academic Press
in English
Cover of: Chemical Mechanical Polishing in Silicon Processing
Chemical Mechanical Polishing in Silicon Processing
1999, Elsevier Science & Technology Books
in English

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Book Details


Classifications

Library of Congress
QC610.9.S48eb vol. 6

The Physical Object

Pagination
307

ID Numbers

Open Library
OL34593970M
ISBN 13
9780080864617

Source records

Better World Books record

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October 6, 2021 Created by ImportBot Imported from Better World Books record