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Ranging from the basic principles to the forefront of microlithography, this unique volume explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing.
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Subjects
Microlithography, Photoresists, Semiconductors, Industrial applications, Manufacturing processes, Design and construction, Microlithographie, Applications industrielles, Fabrication, Résines photosensibles, Manufacturing, TECHNOLOGY & ENGINEERING, Mechanical, Semiconductors--design and construction, Microlithography--industrial applications, Tk7871.85 .n66 1998, 621.3815/2Showing 1 featured edition. View all 1 editions?
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Microlithography fundamentals in semiconductor devices and fabrication technology
1998, Marcel Dekker
in English
0824799518 9780824799519
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Edition Notes
Includes bibliographical references and index.
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