An edition of Microlithography fundamentals in semiconductor devices and fabrication technology (1998)

Microlithography fundamentals in semiconductor devices and fabrication technology

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Cover of: Microlithography fundamentals in semiconductor devices and fabrication technology by Saburo Nonogaki
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Last edited by MARC Bot
July 13, 2024 | History
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An edition of Microlithography fundamentals in semiconductor devices and fabrication technology (1998)

Microlithography fundamentals in semiconductor devices and fabrication technology

by

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  • 0 Currently reading
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Ranging from the basic principles to the forefront of microlithography, this unique volume explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing.

Publish Date
Publisher
Marcel Dekker
Language
English
Pages
327

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Subjects
Microlithography, Photoresists, Semiconductors, Industrial applications, Manufacturing processes, Design and construction, Microlithographie, Applications industrielles, Fabrication, Résines photosensibles, Manufacturing, TECHNOLOGY & ENGINEERING, Mechanical, Semiconductors--design and construction, Microlithography--industrial applications, Tk7871.85 .n66 1998, 621.3815/2

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Edition Availability
Cover of: Microlithography fundamentals in semiconductor devices and fabrication technology
Microlithography fundamentals in semiconductor devices and fabrication technology
1998, Marcel Dekker
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
New York

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7871.85 .N66 1998, TK7871.85.N66 1998, TK7871.85 .N66 1998eb

The Physical Object

Pagination
v, 327 p. :
Number of pages
327

ID Numbers

Open Library
OL345225M
ISBN 10
0824799518
LCCN
98004222
OCLC/WorldCat
45842890, 38948131
Library Thing
8796858
Goodreads
4032470

Source records

Better World Books record
Library of Congress MARC record
marc_columbia MARC record
ISBNdb
marc_columbia MARC record

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History

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July 13, 2024 Edited by MARC Bot import existing book
December 20, 2023 Edited by ImportBot import existing book
December 14, 2022 Edited by MARC Bot import existing book
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 9, 2009 Created by WorkBot add works page