An edition of Microlithography fundamentals in semiconductor devices and fabrication technology
(1998)
Microlithography fundamentals in semiconductor devices and fabrication technology
by Saburo Nonogaki
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Ranging from the basic principles to the forefront of microlithography, this unique volume explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing.
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Subjects
Microlithography, Photoresists, Semiconductors, Industrial applications, Manufacturing processes, Design and construction, Microlithographie, Applications industrielles, Fabrication, Résines photosensibles, Manufacturing, TECHNOLOGY & ENGINEERING, Mechanical, Semiconductors--design and construction, Microlithography--industrial applications, Tk7871.85 .n66 1998, 621.3815/2| Edition | Availability |
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Microlithography fundamentals in semiconductor devices and fabrication technology
1998, Marcel Dekker
in English
0824799518 9780824799519
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Includes bibliographical references and index.
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- Created April 1, 2008
- 11 revisions
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| July 13, 2024 | Edited by MARC Bot | import existing book |
| December 20, 2023 | Edited by ImportBot | import existing book |
| December 14, 2022 | Edited by MARC Bot | import existing book |
| November 28, 2020 | Edited by MARC Bot | import existing book |
| April 1, 2008 | Created by an anonymous user | Imported from Scriblio MARC record |