An edition of Optical inspection of microsystems
(2006)
Optical inspection of microsystems
by Wolfgang Osten
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Subjects
Optical detectors, Optical methods, Quality control, Industrial applications, Microelectronics, Engineering inspection, Optical measurements, Interferometry, Qualité, Contrôle, Méthodes optiques, Détecteurs optiques, Microsystèmes électromécaniques, Dispositifs optoélectroniques, Contrôle technique, Automatisation, TECHNOLOGY & ENGINEERING, Industrial Engineering, MEMS, Mikrosystemtechnik, Optische Analyse| Edition | Availability |
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Edition Notes
Includes bibliographical references and index.
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| December 15, 2022 | Edited by MARC Bot | import existing book |
| August 14, 2020 | Edited by ImportBot | import existing book |
| July 28, 2014 | Created by ImportBot | import new book |