An edition of Advances and challenges in chemical mechanical planarization (2007)

Advances and challenges in chemical mechanical planarization

symposium held April 10-12, 2007, San Francisco, California, U.S.A.

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Advances and challenges in chemical mechanica ...
Symposium C, "Advances and Cha ...
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August 1, 2020 | History
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An edition of Advances and challenges in chemical mechanical planarization (2007)

Advances and challenges in chemical mechanical planarization

symposium held April 10-12, 2007, San Francisco, California, U.S.A.

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Materials Research Society, c2007.
Language
English
Pages
371

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Subjects
Surfaces, Chemical mechanical planarization, Semiconductors, Congrès, Semiconducteurs, Materials, Congresses, Chimie des surfaces, Défauts, Grinding and polishing

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Cover of: Advances and challenges in chemical mechanical planarization
Advances and challenges in chemical mechanical planarization: symposium held April 10-12, 2007, San Francisco, California, U.S.A.
2007, Materials Research Society, c2007.
in English
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Book Details

Edition Notes

"Proceedings ... presented at Symposium C, 'Advances and Challenges in Chemical Mechanical Planarization,' held April 10-12 at the 2007 MRS Spring Meeting"--Pref.

Includes bibliographical references and indexes.

Published in
Warrendale, Pa
Series
Materials Research Society symposium proceedings -- v. 991, Materials Research Society symposia proceedings -- v. 991.

Classifications

Library of Congress
TK7871.85 .S95325 2007, TK7871.85 .S95325 20

The Physical Object

Pagination
xi, 371 p. :
Number of pages
371

ID Numbers

Open Library
OL25176604M
ISBN 10
1558999515
ISBN 13
9781558999510
LCCN
2010540027
OCLC/WorldCat
181599360

Source records

Library of Congress MARC record
Library of Congress MARC record
Better World Books record
Library of Congress MARC record
amazon.com record
marc_columbia MARC record

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August 1, 2020 Edited by ImportBot import existing book
January 25, 2012 Created by LC Bot import new book