An edition of Advances and challenges in chemical mechanical planarization (2007)

Advances and challenges in chemical mechanical planarization

symposium held April 10-12, 2007, San Francisco, California, U.S.A.

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Advances and challenges in chemical mechanica ...
Symposium C, "Advances and Cha ...
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Last edited by MARC Bot
September 24, 2024 | History
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An edition of Advances and challenges in chemical mechanical planarization (2007)

Advances and challenges in chemical mechanical planarization

symposium held April 10-12, 2007, San Francisco, California, U.S.A.

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Publish Date
Publisher
Materials Research Society, c2007.
Language
English
Pages
371

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Subjects

Surfaces, Chemical mechanical planarization, Semiconductors, Congrès, Semiconducteurs, Materials, Congresses, Chimie des surfaces, Défauts, Grinding and polishing
Edition Availability
Cover of: Advances and challenges in chemical mechanical planarization
Advances and challenges in chemical mechanical planarization: symposium held April 10-12, 2007, San Francisco, California, U.S.A.
2007, Materials Research Society, c2007.
in English

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Book Details

Edition Notes

"Proceedings ... presented at Symposium C, 'Advances and Challenges in Chemical Mechanical Planarization,' held April 10-12 at the 2007 MRS Spring Meeting"--Pref.

Includes bibliographical references and indexes.

Published in
Warrendale, Pa
Series
Materials Research Society symposium proceedings -- v. 991, Materials Research Society symposia proceedings -- v. 991.

Classifications

Library of Congress
TK7871.85 .S95325 2007, TK7871.85 .S95325 20

The Physical Object

Pagination
xi, 371 p. :
Number of pages
371

Edition Identifiers

Open Library
OL25176604M
ISBN 10
1558999515
ISBN 13
9781558999510
LCCN
2010540027
OCLC/WorldCat
181599360

Work Identifiers

Work ID
OL16470544W

Source records

Library of Congress MARC record
Library of Congress MARC record
Better World Books record
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amazon.com record
marc_columbia MARC record
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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
September 24, 2024 Edited by MARC Bot import existing book
December 29, 2022 Edited by MARC Bot import existing book
December 3, 2022 Edited by ImportBot import existing book
October 9, 2020 Edited by ImportBot import existing book
January 25, 2012 Created by LC Bot Imported from Library of Congress MARC record