An edition of Silicon micromachining
(1998)
Silicon Micromachining (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering)
by M. Elwenspoek, M. Elwenspoek, and H. V. Jansen
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Subjects
Silicon, Micromachining, Etching, Electronic devices & materials, Technology, Microelectronics, Semiconductor Physics, Technology & Industrial Arts, Science/Mathematics, Electronics - Circuits - General, Engineering - Electrical & Electronic, Material Science, Technology / Engineering / Electrical, Electronics - Microelectronics, Semiconductors, Etching, technique| Edition | Availability |
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Silicon Micromachining (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering)
May 13, 1999, Cambridge University Press
Hardcover
in English
052159054X 9780521590549
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| August 23, 2020 | Edited by ImportBot | import existing book |
| July 31, 2019 | Edited by MARC Bot | associate edition with work OL11983431W |
| January 22, 2010 | Edited by WorkBot | add more information to works |
| December 11, 2009 | Created by WorkBot | add works page |