Selected papers on resolution enhancement techniques in optical lithography

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Last edited by ImportBot
December 7, 2022 | History

Selected papers on resolution enhancement techniques in optical lithography

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Publish Date
Publisher
SPIE Press
Language
English
Pages
875

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Previews available in: English

Book Details


Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
SPIE milestone series -- v. MS 178
Other Titles
Resolution enhancement techniques in optical lithography

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7874 .S4147 2004, TK7874

The Physical Object

Pagination
xx, 875 p.
Number of pages
875

Edition Identifiers

Open Library
OL31597167M
Internet Archive
selectedpaperson0000unse_i8s3
ISBN 10
0819451665
LCCN
2004041639

Work Identifiers

Work ID
OL23886838W

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
December 7, 2022 Edited by ImportBot import existing book
February 21, 2022 Edited by ImportBot import existing book
December 24, 2021 Edited by ImportBot import existing book
December 8, 2020 Created by MARC Bot Imported from Library of Congress MARC record