An edition of Optical Physics for Nanolithography (2018)

Optical Physics for Nanolithography

Pm284

by

Optical Physics for Nanolithography
Anthony Yen, Anthony Yen
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Last edited by ImportBot
February 17, 2023 | History
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An edition of Optical Physics for Nanolithography (2018)

Optical Physics for Nanolithography

Pm284

by

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Publish Date
Publisher
SPIE
Language
English
Pages
352

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Subjects

Optics, Imaging systems, Lithography, Nanolithography, Optique, Imagerie (Technique), Nanolithographie
Edition Availability
Cover of: Optical Physics for Nanolithography
Optical Physics for Nanolithography: Pm284
2018, SPIE
in English
Cover of: Optical Physics for Nanolithography
Optical Physics for Nanolithography: Pm284
2018, SPIE
in English

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Book Details

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Library of Congress

Edition Identifiers

Open Library
OL29792932M
ISBN 13
9781510617384

Work Identifiers

Work ID
OL21629758W

Source records

Better World Books record

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Download catalog record: RDF / JSON / OPDS | Wikipedia citation
February 17, 2023 Edited by ImportBot import existing book
August 31, 2020 Created by ImportBot Imported from Better World Books record