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This book has been written with the purpose of covering all aspects about Semiconductor Device Fabrication Process.
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Semiconductor Device Fabrication Process
2011, World Technologies
electronic resource
in English
9381157316 9789381157312
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Book Details
Table of Contents
Cover; Table of Contents; Chapter 1- Semiconductor Device Fabrication; Chapter 2
Photolithography; Chapter 3
Ion Implantation; Chapter 4
Dry Etching, Etching & Plasma Ashing; Chapter 5
Thermal Treatments; Chapter 6
Chemical Vapor Deposition; Chapter 7
Physical Vapor Deposition; Chapter 8
Molecular Beam Epitaxy & Chemical-Mechanical Planarization; Chapter 9
Wafer Testing, Wafer Backgrinding & Die Preparation; Chapter 10
Other Processes in Semiconductor Device Fabrication.
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- Created July 7, 2019
- 2 revisions
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March 28, 2025 | Edited by ImportBot | Redacting ocaids |
July 7, 2019 | Created by MARC Bot | Imported from Internet Archive item record |