An edition of Semiconductor machining at the micro-nano scale (2007)

Semiconductor machining at the micro-nano scale
Semiconductor machining at the micro-nano sca ...
edited by Jiwang Yan and John ...
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Last edited by MARC Bot
July 31, 2019 | History
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An edition of Semiconductor machining at the micro-nano scale (2007)

Semiconductor machining at the micro-nano scale

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Publish Date
Publisher
Transworld Research Network
Language
English
Pages
360

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Subjects

Semicondutores, Electronic industries, Semiconductors, Design and construction
Edition Availability
Cover of: Semiconductor machining at the micro-nano scale
Semiconductor machining at the micro-nano scale
2007, Transworld Research Network
in English
Cover of: Semiconductor machining at the micro-nano scale
Semiconductor machining at the micro-nano scale
2007, Transworld Research Network
in English

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Book Details

Table of Contents

Part 1/ SINGLE- POINT MACHINING PROCESSES: Surface and subsurface integrity in ductile machining of semiconductor materials/ Jiwang Yan
Numerical simulations and cutting experiments on single point diamond machining of semiconductors and ceramics / John A. Patten, Jerry Jacob, Biswarup Bhattacharya, Andrew Grevstad, Ning Fang and Eric R. Marsh
Ductile machining and high pressure phase transformations of semiconductor crystals / Renato Goulart Jasinevicius, Jaime Gilberto Duduch and Paulo Sergio Pizani.
Part 2/ CHARACTERIZATION OF DEFORMATION MECHANISMS: Microstructural cahnges in silicon caused by indentation and machining / L. C. Zhang
MD simulation of semiconductor micromachining / Hiroaki Tanaka and Shoichi Shimada.
Part 3/ ABRASIVE MACHINING PROCESSES: Grinding of silicon wafers in the nano-technology era / Z.J. Pei, Z. C. Li and G. R. Fisher
Single-crystalline and poly-crystalline silicon wafer production using slurry wire for wafer slicing with micro-and nano-scale rolling-indenting / Sumeet Bhagavat and Imin Kao
Tribo-metrology of CMP / Norm V. Gitts
Part 4/ HYBRID AND LASER MACHINING: Semiconductor nanofabrication by combining nanoscale machining with wet etching / Noboiru Morita and Noritaka Kawasegi
Laser machining of semiconductor devices / Maher S. Amer.

Edition Notes

Includes bibliographical references and index.

Published in
Kerala, India

Classifications

Library of Congress
TK7871.85 .S42934 2007

The Physical Object

Pagination
360 p. :
Number of pages
360

Edition Identifiers

Open Library
OL23923017M
ISBN 10
8178953013
ISBN 13
9788178953014
LCCN
2009417219

Work Identifiers

Work ID
OL18573117W

Source records

Library of Congress MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 31, 2019 Edited by MARC Bot associate edition with work OL18573117W
November 24, 2009 Created by ImportBot Imported from Library of Congress MARC record