An edition of Plasma electronics
(2005)
Plasma electronics
applications in microelectronic device fabrication
by T. Makabe and Z. Petrovic
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Last edited by bgimpertBot
April 16, 2010 | History
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Subjects
Plasma engineering, Mechanical engineering, Science/Mathematics, Physics, Science, Technology & Industrial Arts, Electronics - General, Engineering - Mechanical, Science / Physics, Microelectronics, Plasma (ionized gases), Engineering, Technique des plasmas, TECHNOLOGY & ENGINEERING, Mechanical| Edition | Availability |
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1
Plasma Electronics: Applications in Microelectronic Device Fabrication
2016, Taylor & Francis Group
in English
1138034150 9781138034150
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2
Plasma Electronics: Applications in Microelectronic Device Fabrication (Series in Plasma Physics)
March 27, 2006, Taylor & Francis
Hardcover
in English
0750309768 9780750309769
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4
Plasma Electronics: Applications in Microelectronic Device Fabrication
2006, Taylor & Francis Group
in English
1420012274 9781420012279
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5
Plasma electronics: applications in microelectronic device fabrication
2006, Taylor&Francis
in English
0750309768 9780750309769
|
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|
6
Plasma electronics: applications in microelectronic device fabrication
2005, Taylor&Francis
in English
0750309768 9780750309769
|
zzzz
|
Book Details
Edition Notes
Includes bibliographical references and index.
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- Created December 19, 2008
- 3 revisions
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| April 16, 2010 | Edited by bgimpertBot | Added goodreads ID. |
| December 15, 2009 | Edited by WorkBot | link works |
| December 19, 2008 | Created by ImportBot | Imported from University of Toronto MARC record |