Integrated circuit metrology, inspection, and process control III

27-28 February 1989, Los Angeles, California

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Last edited by MARC Bot
July 31, 2019 | History

Integrated circuit metrology, inspection, and process control III

27-28 February 1989, Los Angeles, California

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Publish Date
Publisher
SPIE
Language
English
Pages
535

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Book Details


Edition Notes

Includes bibliographical references.

Published in
Bellingham, Wash
Series
Proceedings of SPIE--the International Society for Optical Engineering -- v. 1087

Classifications

Dewey Decimal Class
621.381/5
Library of Congress
TK7874 .I54682 1989

The Physical Object

Pagination
x, 535 p. :
Number of pages
535

Edition Identifiers

Open Library
OL21478668M
ISBN 10
0819401226
Goodreads
4270586

Work Identifiers

Work ID
OL9251061W

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 31, 2019 Edited by MARC Bot associate edition with work OL9251061W
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
April 13, 2010 Edited by Open Library Bot Linked existing covers to the edition.
November 2, 2008 Created by ImportBot Imported from University of Toronto MARC record