An edition of Integrated Circuit Metrology, Inspection, and Process Control III
(1989)
Integrated circuit metrology, inspection, and process control III
27-28 February 1989, Los Angeles, California
by Kevin M. Monahan
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Subjects
Inspection, Congresses, Integrated circuits, Measurement| Edition | Availability |
|---|---|
1
Integrated Circuit Metrology, Inspection, and Process Control III: 27-28 February 1989, Los Angeles, California (Spie Proceedings, Vol 1087)
July 1989, Society of Photo Optical
Paperback
in English
0819401226 9780819401229
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2
Integrated circuit metrology, inspection, and process control III: 27-28 February 1989, Los Angeles, California
1989, SPIE
in English
0819401226 9780819401229
|
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Includes bibliographical references.
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- Created November 2, 2008
- 4 revisions
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| July 31, 2019 | Edited by MARC Bot | associate edition with work OL9251061W |
| April 16, 2010 | Edited by bgimpertBot | Added goodreads ID. |
| April 13, 2010 | Edited by Open Library Bot | Linked existing covers to the edition. |
| November 2, 2008 | Created by ImportBot | Imported from University of Toronto MARC record |