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"Nano- and Microelectromechanical Systems builds the theoretical foundation needed to develop, analyze, and prototype NEMS and MEMS, their components, and their structures. It provides the background engineers need to model, design, simulate, control, implement, and deploy NEMS and MEMS. Most importantly, it prepares them to continue research in this challenging field and contribute to its further advancement."--BOOK JACKET.
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Subjects
Microelectromechanical systems, Nanotechnology, Microelectronics, Electromechanical devices, Engineering, Microsystèmes électromécaniques, Nanotechnologie, TECHNOLOGY & ENGINEERING / Mechanical, Elektromechanisches Bauelement, Mikromechanik, Mikrosystemtechnik, Microeletrônica, NanotecnologiaBook Details
Edition Notes
Includes bibliographical references and index
Classifications
The Physical Object
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- Created September 26, 2008
- 7 revisions
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July 14, 2024 | Edited by MARC Bot | import existing book |
September 15, 2021 | Edited by ImportBot | import existing book |
July 29, 2020 | Edited by MARC Bot | import existing book |
August 18, 2010 | Edited by IdentifierBot | added LibraryThing ID |
September 26, 2008 | Created by ImportBot | Imported from Miami University of Ohio MARC record |