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"Nano- and Microelectromechanical Systems builds the theoretical foundation needed to develop, analyze, and prototype NEMS and MEMS, their components, and their structures. It provides the background engineers need to model, design, simulate, control, implement, and deploy NEMS and MEMS. Most importantly, it prepares them to continue research in this challenging field and contribute to its further advancement."--BOOK JACKET.
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Subjects
Microelectromechanical systems, Nanotechnology, Microelectronics, Electromechanical devices, Engineering, Microsystèmes électromécaniques, Nanotechnologie, TECHNOLOGY & ENGINEERING / Mechanical, Elektromechanisches Bauelement, Mikromechanik, Mikrosystemtechnik, Microeletrônica, NanotecnologiaShowing 8 featured editions. View all 8 editions?
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Edition Notes
Includes bibliographical references and index.
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The Physical Object
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- Created October 12, 2008
- 10 revisions
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May 4, 2023 | Edited by ImportBot | import existing book |
December 30, 2022 | Edited by MARC Bot | import existing book |
December 15, 2022 | Edited by MARC Bot | import existing book |
December 8, 2020 | Edited by MARC Bot | import existing book |
October 12, 2008 | Created by ImportBot | Imported from Oregon Libraries MARC record |