Optical characterization techniques for high-performance microelectronic device manufacturing

20 October 1994, Austin, Texas

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Last edited by Scott365Bot
October 23, 2023 | History

Optical characterization techniques for high-performance microelectronic device manufacturing

20 October 1994, Austin, Texas

vii, 202 p. : 28 cm

Publish Date
Publisher
SPIE
Language
English
Pages
202

Buy this book

Previews available in: English

Book Details


Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Wash., USA
Series
Proceedings / SPIE--the International Society for Optical Engineering ;, v. 2337, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 2337.

Classifications

Dewey Decimal Class
621.3815/2/0287
Library of Congress
TK7871.85 .O595 1994, TK7871.85.O595 1994

The Physical Object

Pagination
vii, 202 p. :
Number of pages
202

Edition Identifiers

Open Library
OL1125385M
Internet Archive
opticalcharacter0000unse
ISBN 10
0819416703
LCCN
94067263
OCLC/WorldCat
31210042
Goodreads
4064374

Work Identifiers

Work ID
OL23536567W

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History

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October 23, 2023 Edited by Scott365Bot import existing book
September 30, 2023 Edited by Scott365Bot Linking back to Internet Archive.
January 17, 2023 Edited by ImportBot import existing book
January 14, 2023 Edited by ImportBot import existing book
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record