An edition of Electron-Beam, X-Ray, and Ion-Beam Technology (1990)

Electron-beam, X-ray, and ion-beam technology

submicrometer lithographies IX : 7-8 March 1990, San Jose, California

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Cover of: Electron-beam, X-ray, and ion-beam technology by Douglas J. Resnick, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
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Last edited by ImportBot
July 28, 2023 | History
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An edition of Electron-Beam, X-Ray, and Ion-Beam Technology (1990)

Electron-beam, X-ray, and ion-beam technology

submicrometer lithographies IX : 7-8 March 1990, San Jose, California

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE--the International Society for Optical Engineering
Language
English
Pages
344

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Previews available in: English

Subjects
Electron beam Lithography, Congresses, X-ray lithography, Ion beam lithography

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Edition Availability
Cover of: Electron-Beam, X-Ray, and Ion-Beam Technology
Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX (Spie Proceedings , Vol 1263)
December 1990, SPIE-International Society for Optical Engine
Paperback
Libraries near you: WorldCat
Cover of: Electron-beam, X-ray, and ion-beam technology
Electron-beam, X-ray, and ion-beam technology: submicrometer lithographies IX : 7-8 March 1990, San Jose, California
1990, SPIE--the International Society for Optical Engineering
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
Proceedings / SPIE--the International Society for Optical Engineering -- v. 1089, Proceedings of SPIE--the International Society for Optical Engineering -- v. 1263.
Other Titles
Submicrometer lithographies nine.

The Physical Object

Pagination
viii, 344 p. :
Number of pages
344

ID Numbers

Open Library
OL15302038M
Internet Archive
isbn_0819403105_1263
ISBN 10
0819403105
LCCN
90060893
OCLC/WorldCat
21914564
Goodreads
4519154

Source records

Internet Archive item record
marc_columbia MARC record

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July 28, 2023 Edited by ImportBot import existing book
December 11, 2009 Created by WorkBot add works page